Surface and Volume Effects of Moisture
Abstract
The work presented in this report gives and understanding of the interaction modes between moisture and the materials used in the manufacture of the major commercially available moisture sensors for microelectronics. Chemisorption, physical adsorption and absorption of water vapor on silicon oxide and aluminum oxide have been studied on a theoretical basis. A thermal characterization of these materials by Differential Scanning Analysis (DSC) and Moisture Evolution Analysis (MEA) has been done to assess the limits of their applicability for moisture measurement in microelectronic packages. It has been determined that thermal silicon dioxide is stable during package assembly while aluminum oxide exhibits a structural change at 360 C, which can affect the sensitivity of the volume effect sensors when exposed to higher temperatures. Keywords: Surface conductivity sensor; Aluminum oxide sensors.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1988
- Accession Number
- ADA206804
Entities
People
- Didier Kane
- Henry Domingos
Organizations
- Clarkson University