The Structure of Self-Assembled Monolayers of Alkylsiloxanes on Silicon: A Comparison of Results from Ellipsometry and Low-Angle X-Ray Reflectivity

Abstract

The thicknesses of alkylsiloxane monolayers on silicon silicon dioxide substrates have been measured using ellipsometry and low angle X ray reflection. Thicknesses measured by the two methods differ by 2.2 A (rms) for alkyl chains of 10 - 18 carbon atoms have a maximum difference of 4.2 A. Ellipsometry systematically yields a larger thickness. This discrepancy may result from differences between the two techniques in their sensitivity to the structure of the interface between silicon dioxide and the alkylsiloxane monolayer. The X-ray reflectivity measurements provide evidence that these organic monolayers do not build up as island structures and demonstrate that the approximate area projected by each alkyl group in the plane of the monolayer is approx. 20 + or - 4 A2.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1989
Accession Number
ADA208341

Entities

People

  • B. M. Ocko
  • G. M. Whitesides
  • I. M. Tidswell
  • Peter S. Pershan
  • S. R. Wasserman

Organizations

  • Harvard University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Alkanes
  • Chemical Engineering
  • Chemical Synthesis
  • Chemistry
  • Crystal Structure
  • Electron Density
  • Films
  • Geometry
  • Low Angles
  • Materials
  • Materials Laboratories
  • Materials Science
  • Measurement
  • Monomolecular Films
  • Refractive Index
  • Silicon Compounds
  • Silicon Dioxide

Fields of Study

  • Physics

Readers

  • Thin Film Deposition Science.