A Manufacturing Scheduler's Perspective on Semiconductor Fabrication
Abstract
In this paper, we describe the phenomena in semiconductor fabrication which are important for production scheduling. We focus our attention on collecting and understanding events, and describing related concepts, such as fabrication processes, operation sets, production machines, support machines, accessories, operation worker, support technicians, activities, objectives, etc. We do not suggest scheduling policies here; instead the goal is to characterize all the events that must be considered in developing such a policy.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1989
- Accession Number
- ADA208372
Entities
People
- S. B. Gershwin
- Xiaoli Bai
Organizations
- Massachusetts Institute of Technology