A Soluble Photosensitive Polyimide

Abstract

We have been studying an intrinsically photosensitive polymide derived from cyclobutane dianhydride and oxydianiline which exhibits both good thermal stability (50% weight loss at 460 C) and high deep ultraviolet sensitivity (45mJ/cm2)1. However, the insolubility of cured polyimide films complicates the detailed mechanistic investigation of the photochemical process. We have therefore prepared a soluble homolog of this system which is derived from the photodimer of methyl maleic anhydride (dimethyl cyclobutane dianhydride). This material may also be imaged with deep ultraviolet radiation and exhibits good thermal stability. A discussion of the photochemical behavior of this soluble system will be presented.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1989
Accession Number
ADA209634

Entities

People

  • Andrew N. Dasheff
  • J. A. Moore

Organizations

  • Rensselaer Polytechnic Institute

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Anhydrides
  • Availability
  • Body Weight
  • Chemical Synthesis
  • Chemistry
  • Contracts
  • Corporations
  • Films
  • Governments
  • High Pressure
  • Materials
  • Measurement
  • New York
  • Organic Chemistry
  • Photolithography
  • Sensitivity
  • Thermal Stability

Readers

  • Molecular Genetics
  • Optical Physics and Photonics.
  • Polymer Science and Engineering.