Computer-Aided Fabrication System Implementation

Abstract

The major objective of this contract was to develop a computer system to aid the fabrication of VLSI integrated circuits. Particular attention was paid to use of university and industry standards in the system, and an open architecture. Other objectives of this contract were to extend the system architecture to encompass mechanical properties of integrated circuits, particularly as these may affect reliability, and to incorporate models for VLSI fabrication equipment. (jes)

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Document Details

Document Type
Technical Report
Publication Date
Dec 31, 1988
Accession Number
ADA213005

Entities

People

  • Dimitri A Antoniadis
  • Emanuel M. Sachs
  • Paul Penfield Jr.
  • Stanley B. Gershwin
  • Stephen D. Senturia

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Application Software
  • Artificial Intelligence
  • Chemical Vapor Deposition
  • Computational Science
  • Computer Programming
  • Computer Programs
  • Computer Science
  • Computers
  • Data Storage Systems
  • Databases
  • Electrical Engineering
  • Experimental Design
  • Fabrication
  • Information Science
  • Integrated Circuits
  • Manufacturing
  • Semiconductor Manufacturing

Readers

  • Parallel and Distributed Computing.
  • Software Engineering
  • Systems Analysis and Design