Computer-Aided Fabrication System Implementation
Abstract
The major objective of this contract was to develop a computer system to aid the fabrication of VLSI integrated circuits. Particular attention was paid to use of university and industry standards in the system, and an open architecture. Other objectives of this contract were to extend the system architecture to encompass mechanical properties of integrated circuits, particularly as these may affect reliability, and to incorporate models for VLSI fabrication equipment. (jes)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 31, 1988
- Accession Number
- ADA213005
Entities
People
- Dimitri A Antoniadis
- Emanuel M. Sachs
- Paul Penfield Jr.
- Stanley B. Gershwin
- Stephen D. Senturia
Organizations
- Massachusetts Institute of Technology