Full Surface Interferometric Testing of Grazing Incidence Mirrors
Abstract
This research is in the initial stage of testing, designing, and constructing a scanning shearing interferometer breadboard for measuring the full surface figure and macroroughness of cylindrical and toroidal aspheric grazing incidence mirrors. This approach using normal incidence subaperture shearing interferometry combines high measuring accuracy and measuring speed with low sensitivity to environmental disturbances. Past approaches used: a) full aperture interferometry at grazing incidence, which results in very small beam cross section and low accuracy and b) pointwise interferometry with a long trace profiler, which is too slow and too sensitive to environmental disturbances for full surface scanning. To achieve this goal a cylindrical beam shearing interferometer is used to measure the mirror figure over a series of extended, overlapping subapertures, then the full surface figure is synthesized in software.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1989
- Accession Number
- ADA213590
Entities
People
- John L. Remo