Book of Abstracts (Plasma-Surface Interaction and Processing of Materials)

Abstract

1-Basic Physics of Plasmas/Discharges. 2-Low Temperature Plasma Chemistry. 3-Optical Diagnostic Techniques for Low Pressure Plasmas and Plasma Processing. 4-Modern Plasma Probe Diagnostics. 5-Transport Phenomena in Plasma Processing.

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Document Details

Document Type
Technical Report
Publication Date
Sep 22, 1989
Accession Number
ADA213602

Entities

People

  • A. Ricard
  • Daniel L. Flamm
  • H. Urbassek
  • J. A. Valles-abarca
  • James M. Harper
  • Orlando Auciello
  • V. M. Donnelly
  • Valery Godyak

Organizations

  • University of Alicante

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Ceramic Materials
  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Electron Energy
  • Fabrication
  • Mass Spectrometry
  • Material Degradation Processes
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Measurement
  • Optical Properties
  • Polymeric Films
  • Spectra
  • Spectrometry

Fields of Study

  • Chemistry

Readers

  • Pulsed Power and Plasma Physics.
  • Technical Research and Report Writing.