Annual Gaseous Electronics Conference (41st) Held in Minneapolis, Minnesota on 18-21 October 1988
Abstract
Session Topics include: Electron-atom collisions; Charged particle distributions and electric fields; Thermal and high pressure plasma processes; Electron and photon interactions; Workshop on the design, calibration, and modeling of research RF plasma processing systems; Posters -- Gaseous electronics; Models and diagnostics of lighting discharges; Electron collisions, including excited states; Lasers; Plasma-surface phenomena; Silane plasmas; Beam-plasma interactions; Non-equilibrium electron transport; Neutral particle distributions; Heavy particle interactions; RF glow discharge modeling; Breakdown and switching; Physics in a Positron Trap; Low-pressure discharges; Experimental -- Electron-molecule collisions; Follow-up to the Workshop on the Design, Calibration, and Modeling of Research RF Plasma Processing Systems.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 01, 1989
- Accession Number
- ADA214540
Entities
People
- Douglas W. Ernie
Organizations
- University of Minnesota