Reactions of Atmospheric Species with Clean and H, C, and O Implanted Species

Abstract

The interactions of low energy ions with surfaces have been studied using surface science techniques. The energy range studied is from about 1 eV-5 keV, the ions involved are rate gas ions (He+, Ne+, Ar+) and reactive ions such as N+2, N+, C+, CO+, and O+, and the surfaces included compounds such as K2TiF6, K2NbF7, K2TaF7, and boron nitride (BN) and elemental materials such as graphite, gold, magnesium, nickel, boron, Si(100), and W(211). The phenomena investigated included scattering, recoiling, ion induced surface damage (decomposition, oxidation, nitridation, chemisorption), inelastic collisions with emission of photons and electrons, scattered and recoiled ion fractions, collisional dissociation, and the dynamics of low energy collisions. The results are contained in six scientific publications in refereed journals. Keywords: Nitrogen; Carbon; Carbon monoxide; Potassium; Neon; Argon; Helium; Titanium; Fluorine; Tantalium; Niobium; Ion-surface collisions; Scattering; Recoiling; Reactive ions; Ion induced decomposition; Collisional dissociation.

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Document Details

Document Type
Technical Report
Publication Date
Jul 27, 1989
Accession Number
ADA214602

Entities

People

  • J. W. Rabalais

Organizations

  • University of Houston

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemical Elements
  • Chemical Reaction Properties
  • Chemical Reactions
  • Chemical Synthesis
  • Chemistry
  • Dissociation
  • Electrons
  • Energy Transfer
  • Ions
  • Materials
  • Materials Processing
  • Materials Science
  • Metals
  • Molecular Dynamics
  • Solid State Physics
  • Spectra
  • Surface Properties

Fields of Study

  • Physics

Readers

  • Molecular Photonics/Laser Physics
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics