Gordon Research Conference on Plasma Chemistry (10th), Held in Tilton, New Hampshire on August 15-19, 1988
Abstract
The 1988 Gordon Research Conference on Plasma Chemistry was divided into nine sessions. Eight had two or three invited talks and two or three discussion papers with the total never exceeding five. The ninth session was a poster session which had 45 presentations. Two sessions dealt with the latest findings in low pressure, non-equilibrium plasma chemistry, covering the topics of plasmas in device technology, and plasma enhanced processing including diamond thin films and microwave plasma etching. One high pressure, thermal plasma session covered plasma processing for metallurgical applications and surface-plasma interactions. Six joint sessions included sessions on future plasma chemistry, nucleation and growth, plasma modeling, one each on diagnostics and new techniques in plasma synthesis/processing and the poster session. All the sessions were very well attended and generated much interest. (aw)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1989
- Accession Number
- ADA215161
Entities
People
- Alan Garscadden
Organizations
- Gordon Research Conferences