A Combined XPS-Modulated Molecular Beam Investigation of Reactions of Oxygen & Fluorine with Silicon Aces

Abstract

The equipment purchased with this instrumentation grant has been used to equip an ultrahigh vacuum molecular beam - surface scattering apparatus with surface spectroscopy components as well as a number of electronic and vacuum components needed to carry out the experiments. These experiments which were described in the initial proposal are currently being funded under AFOSR grant 84-NC-029. (AW)

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1984
Accession Number
ADA215335

Entities

People

  • Thomas Engel

Organizations

  • University of Washington

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Chemistry
  • Classification
  • Demonstrations
  • Fluorine
  • Instrumentation
  • Measuring Instruments
  • Molecular Beams
  • Scattering
  • Security
  • Spectroscopy
  • Ultrahigh Vacuum
  • Universities
  • Vacuum

Fields of Study

  • Physics

Readers

  • Molecular Photonics/Laser Physics
  • Research Science/Academic Research
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics