Low Voltage Scanning Electron Microscopy
Abstract
Low voltage scanning electron microscopy has become an established technique over the last few years and this LVSEM project has made a major contribution to this process. At low voltages the beam-specimen interaction is modified, the range of beam penetration within the specimen is greatly reduced and the yield of secondary electrons is enhanced sufficiently to eliminate most of the severe charging and image distortion problems experienced with electrically non-conducting samples at higher voltages. There has been detailed study of the optical problems of low voltage operation, and the considerable potential which exists for improvements in the instrumentation; some of which have been published. In the meantime the low voltage performance of conventional SEMs has been developed by the various manufacturers to achieve typically approx. 0.1 microns at 1kV. The case for a dedicated LVSEM, able to challenge TEM resolution, remains strong. Keywords: Scanning electron microscopy; X ray; Microanalysis; Low voltage; High resolution; Ceramic surfaces; Supported catalysts; Metal particles; Field emission; Second zone lens; Digital imaging; Surface studies. (jhd)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 01, 1988
- Accession Number
- ADA215412
Entities
People
- E. D. Boyes
Organizations
- University of Oxford