Computer-Aided Fabrication of Integrated Circuits

Abstract

The major objective of this research program is to develop a Computer Aided Fabrication (CAF) environment to support the design, implementation, and manufacturing of processes for integrated circuits with special emphasis on prototyping and application specificity. The primary testbed for all components of the CAF system is the Integrated Circuits Lab at MIT. These components are the result of research in five areas: CAF system architecture; Modular process design; Scheduling of fabrication events; Equipment modeling; and Mechanical property TCAD. Computer aided design; VLSI; Integrated circuits; Three dimensional; Computer aided manufacturing. (edc)

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Document Details

Document Type
Technical Report
Publication Date
Sep 30, 1989
Accession Number
ADA215439

Entities

People

  • Dimitri A Antoniadis
  • Emanuel M. Sachs
  • Paul Penfield Jr.
  • Stanley B. Gershwin
  • Stephen D. Senturia

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Ceramic Materials
  • Chemical Vapor Deposition
  • Chemistry
  • Computational Science
  • Computer Programming
  • Computer Science
  • Computers
  • Control Systems
  • Database Management Systems
  • Databases
  • Engineers
  • Fabrication
  • Lisp Programming Language
  • Mechanical Properties
  • Processing Equipment
  • Semiconductor Manufacturing
  • Three Dimensional

Readers

  • Computer Science.
  • Exercise and Sports Science.
  • Integrated Circuit Design and Technology.