Evaluation of Chemically-Sensitive Field-Effect Transistors for Detection of Organophosphorus Compounds

Abstract

This study resulted in the design, fabrication, and evaluation of an interdigitated gate electrode Chemically-Sensitive Field-Effect Transistor (CHEMFET). The electrical performance of the CHEMFET sensors coated with the following thin films was evaluated in frequency domain for detecting the gas concentration changes of organophosphorus compounds (diisopropyl methylphosphonate (DIMP) and dimethyl methylphosphonate (DMMP)) in the air: cobalt phthalocyanine, nickel phthalocyanice, 2-maphthol (beta), succinylchoride, succinylcholine chloride, and L-histidine dihydrochloride. The change in the chemical state of a film was manifested as a change in the CHEMFET sensors' output response, when the CHEMFET SENSOR was excited with a pulse. The results showed the CHEMFET sensor coated with cobalt phthalocyanine produced consistent responses upon exposure, with respect to three concentrations of DIMP and DMMP, at two measurement temperatures. Thesis. (rrh)

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Dec 05, 1989
Accession Number
ADA215536

Entities

People

  • Jenny E. Shin

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Amines
  • Chemical Reactions
  • Chemistry
  • Complementary Metal-Oxide Semiconductors
  • Detection
  • Detectors
  • Electrical Impedance
  • Fabrication
  • Field Effect Transistors
  • Integrated Circuits
  • Measurement
  • Metal Oxide Semiconductors
  • Organic Compounds
  • Organophosphorus Compounds
  • Piezoelectric Crystals
  • Semiconductors
  • Test And Evaluation

Readers

  • Analytical Chemistry
  • Thin Film Deposition Science.