Evaluation of Doped Phthalocyanines and a Chemically-Sensitive Field Effect Transistor for Detecting Nitrogen Dioxide

Abstract

This study involved the design and fabrication of an integrated circuit microsensor for the detection of nitrogen dioxide; metal-doped phthalocyanine compounds were evaluated as a candidate chemically-sensitive membrane, and their performance was compared with respect to sensitivity, reversibility, and specificity. The microsensor consisted of the integration of an array of nine sensing elements with amplifiers, a reference amplifier, and an analog multiplexer. The nine individual sensing elements used an interdigitated gate electrode field-effect transistor (IGEFET) coupled to a serially-connected pair of inverting amplifiers using metal-oxide-semiconductor field-effect transistors(MOSFETs). The interdigitated gate electrodes were coated with thin films of cobalt (II) phthalocyanine (CoPc), copper phthalocyanine (CuPc), lead phthalocyanine (PbPc), nickel (II) phthalocyanine (NiPc), and (undoped) phthalocyanine (Pc). An excitation signal was applied to the integrated circuit, and the multiplexed electrical response was measured in the time-domain and the frequency-domain. The electrical response was evaluated upon exposure to 20-, 80-, and 320-ppb of nitrogen dioxide (NO2) and diisopropyl methylphosphonate (DIMP) using filtered room air (less than 5% relative humidity) as the diluent. The electrical response was evaluated for film thickness of approximately 1500 A and 500 A. The rank ordering of the sensitivity of the materials to nitrogen dioxide from the most to least sensitive was: CoPc, NiPc, CuPc, PbPc, and then (undoped) Pc. Theses.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Dec 04, 1989
Accession Number
ADA215662

Entities

People

  • Thomas J. Jenkins

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Ground and Sea Platforms
  • Sensors
  • Weapons Technologies

DTIC Thesaurus Topics

  • Chemistry
  • Detection
  • Detectors
  • Energy Bands
  • Field Effect Transistors
  • Integrated Circuits
  • Material Degradation Processes
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Measurement
  • Metal Oxide Semiconductors
  • Nitrogen Oxides
  • Oxide Films
  • Semiconductors
  • Test And Evaluation

Readers

  • Analytical Chemistry
  • Electrochemical Engineering/ Fuel Cell Technologies
  • Solar Photovoltaics and Thermoelectric Devices.

Technology Areas

  • Microelectronics