Adsorption and Decomposition of Chemisorbed Propylene on the Si(100)- (2x1) Surface: A Laser-Induced Thermal Desorption Study
Abstract
Deuterated propylene (C3D6) chemisorption and decomposition on the Si(100)-(2x1) surface has been studied in ultrahigh vacuum by using laser induced thermal desorption (LITD) and temperature programmed desorption techniques (TPD). Propylene was found to adsorb molecularly at 110 K and to remain as an undecomposed molecular adsorbate up to approx. 500 K. As the surface temperature is increased, the propylene can both thermally desorb and decompose. ultimately producing a SiC thin film LITD was used to study C3D6 and D2 desorption as a function of surface temperature during temperature programming. Slow heating leads to strongly enhanced C3D6 decomposition compared to fast heating by laser irradiation. The decomposition of propylene is apparently a multistep process because deuterium is released from the chemisorbed propylene (and its fragments) over a temperature range from approx. 450 to 850 K. D2 desorption from the decomposition of C3D6 occurs at higher temperature compared to that observed for chemisorbed deuterium.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 22, 1989
- Accession Number
- ADA217220
Entities
People
- John Yates
- Kenneth C. Janda
- Kumar Sinniah
- Michael G. Sherman
Organizations
- University of Pittsburgh