Fluorinated Diamond Thin Films for Tribological Applications

Abstract

Diamond (100) substrates have been fluorinated with both atomic and molecular fluorine under ultrahigh vacuum conditions using molecular beams. X- ray photoelectron spectra of the resulting samples indicate that atomic fluorine, F, reacts with an initial accommodation coefficient of 0.25 (+ or - 0. 1) at 298 K; a saturation coverage of about three quarters of a monolayer is obtained. The carbon fluoride adlayer is thermally stable to 700 K, but slowly desorbs at temperatures above this. In contrast, molecular fluorine, F2, reacts quite slowly; a saturation coverage of less than one fifth of a monolayer after several hundred monolayers exposure to F2 at temperatures from 300 K to 700 K is achieved. In addition, diamond substrates saturated with fluorine atoms showed no loss of fluorine after exposure to beams of H2 and O2 at temperatures between 300 K and 700 K. Keywords: Diamond thin films; Fluorination; Tribology.

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Document Details

Document Type
Technical Report
Publication Date
Jan 04, 1990
Accession Number
ADA217452

Entities

People

  • Andrew Freedman
  • Charter Stinespring

Organizations

  • Aerodyne Research

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Chemistry
  • Coefficients
  • Diamond Films
  • Diffraction
  • Electrons
  • Films
  • Fluorine
  • Friction
  • Materials
  • Molecular Beams
  • Monomolecular Films
  • Spectra
  • Substrates
  • Thin Films
  • Ultrahigh Vacuum
  • X Rays

Fields of Study

  • Physics

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Organic Chemistry
  • Tribology (the study of the boundary interaction between sliding surfaces, lubrication, wear and friction).

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene