Laser- and Particle-Beam Chemical Processes on Surfaces. Volume 129
Abstract
The Materials Research Society held their symposium 'Laser & Particle-Beam Chemical Processes on Surfaces' in Boston, Massachusetts on November 28 - December 3, 1988. Parts I thru X of this report discuss the following research topics: Overview of Laser- and Beam-Induced Surface Processes; Laser-Induced Deposition of Metal Films; Laser-Induced Writing of Metal Lines; Laser-Induced Deposition of Semiconductors; Laser-Induced Chemical Etching; Laser-Induced Surface Ablation; Laser-Induced Surface Modification; Ion-, Electron-, and Plasma-Assisted Chemistry; and Integrated Circuits Fabricated Technology. (JG)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 26, 1989
- Accession Number
- ADA217804
Entities
People
- A. W. Johnson
- Gary L. Loper
- T. W. Sigmon
Organizations
- Materials Research Society