Microelectronic Device Reliability
Abstract
Research on pulsed current electromigration in fine-line VLSI metallization was performed. A test structure containing 6 sample lines was designed in accordance with NBS recommendations (Ca. 1987) fabricated by an industrial firm and supplied to Clemson University for continued electromigration research.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 15, 1990
- Accession Number
- ADA218774
Entities
People
- James W. Harrison Jr.
Organizations
- Clemson University