CVD Diamond Films for Tribological Applications
Abstract
Friction and wear behavior of several types of diamond film has been studied using sapphire on diamond film and diamond on diamond film tests. The coefficient of friction of the films was found to be a strong function of film morphology for sapphire on diamond film tests, and of diamond bonding content for diamond on diamond film tests. Smooth films were found to have coefficients of friction approaching the lower value for natural diamond (0.05), regardless of bonding composition. Films were deposited in three groups. Film morphology and graphite content were varied in the first group. In the second group, increased growth rates of highly diamond-bonded material were sought. Smooth, very fine grained material of varied bonding content was produced in the third. Attempts at surface planarization through etching and regrowth were not successful. All films were found to have excellent adhesion to both silicon and silicon carbide substrates. This study indicates that CVD diamond films have excellent potential for use as solid-film bearings, and that this potential merits further work. (aw)
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 31, 1990
- Accession Number
- ADA220265
Entities
People
- Ian Hayward
- John Wegand
- Linda S. Plano