Direct Writing of Microstructures for Solid-State Electronics

Abstract

Progress in using laser chemical processing for several applications in microelectronics and integrated optics is described. These applications are direct writing of metal interconnects on silicon integrated circuits; laser doping, etching and surface modification of GaAs, and fabrication of light guiding components for integrated optics. Keywords: Laser processing; Optical coupler; Diffraction grating; Laser; GaAs; Si; Integrated optics; Integrated circuits; Aluminum metallization; Shallow doping; Waveguides.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1990
Accession Number
ADA220996

Entities

People

  • Dragan Podlesnik
  • Richard M. Osgood
  • Rob Scarmozzino

Organizations

  • Columbia University

Tags

DTIC Thesaurus Topics

  • Chemistry
  • Electronics Laboratories
  • Frequency Combs
  • Gratings (Spectra)
  • Integrated Circuits
  • Laser Applications
  • Laser Beams
  • Laser Diodes
  • Lasers
  • Light (Electromagnetic Radiation)
  • Materials Processing
  • Measurement
  • Optics
  • Power Electronics
  • Semiconductor Devices
  • Semiconductors
  • Ultraviolet Lasers

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Optical Physics and Photonics.

Technology Areas

  • Directed Energy
  • Microelectronics