Ultra Precision Machining
Abstract
There are a number of fields that require or can use to advantage very high precision in machining. For example, further development of high energy lasers and x-ray astronomy depend critically on the manufacture of light weight reflecting metal optical components. To fabricate these optical components with machine tools they will be made of metal with mirror quality surface finish. By mirror quality surface finish we mean the dimensions tolerances on the order of 0.02 microns and surface roughness of 0.07. These accuracy targets fall in the category of ultra precision machining. They cannot be achieved by a simple extension of conventional machining processes and techniques Tonaguchi, N., 1983; Brown, N.J. et al, 1983. They require single crystal diamond tools, special attention to vibration isolation, special isolation of machine metrology, and on line correction of imperfection in the motion of the machine carriages on their way.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 20, 1990
- Accession Number
- ADA222422
Entities
People
- Daniel B. Debra
- Lambertus Hesselink
- Thomas Binford
Organizations
- Stanford University