DoD-University Research Instrumentation Program, FY 1986/FY 1987
Abstract
The objective of this DOD/AFOSR - University Research Instrumentation Program was to purchase and install a scanning electron microscope (SEM) system that is essential for examination and characterization of the detailed dimensions and structures of the integrated optic devices and modules that have been fabricated and explored. The SEM system acquired consists of the following major components: Model SR-50/A basic SEM system by Applied Beam, E-beam blanker unit, Model 5000-2 energy dispersive X-ray (EDX) system, Laserwriter, Closed loop water cooling system for the diffusion pump of the SEM basic system.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 09, 1990
- Accession Number
- ADA222578
Entities
People
- Chen S. Tsai
Organizations
- University of California, Irvine