Polymeric Aluminasilazane Precursors for Aluminosilicon Nitride
Abstract
The reaction of trimethylaluminum with the cyclic oligomers obtained by ammonolysis of methyldichlorosilane results in evolution of methane and formation of soluble, cross-linked aluminasilazanes. Pyrolysis of the products in a stream of argon gives a good yield of black aluminosilicon carbonitride, while pyrolysis in a stream of ammonia results in formation of white aluminosilicon nitride. (jg)
Document Details
- Document Type
- Technical Report
- Publication Date
- May 04, 1990
- Accession Number
- ADA222755
Entities
People
- Dietmar Seyferth
- Gregor Brodt
Organizations
- Massachusetts Institute of Technology