Polar Coordinate Laser Writer for Binary Optics Fabrication

Abstract

A Laser Writer system for recording centro-symmetric patterns in photoresist has been developed as an alternative method for binary optics mask and component fabrication. This system is capable of generating binary amplitude patterns with linewidths below 1 micron and with a positional accuracy of less than 0.1 micron on up to 3 in. diameter planar substrates. The measured wavefront error and diffraction efficiency of a direct-write two-phase-level F/ 10 lens confirm that high quality components can be fabricated quickly, easily, and at low cost. (RH)

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Document Details

Document Type
Technical Report
Publication Date
Feb 01, 1990
Accession Number
ADA222827

Entities

People

  • Sharlene Liu
  • William L. Goltsos

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Air Platforms
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Accuracy
  • Amplitude
  • Barometric Pressure
  • Brushless Dc Motors
  • Computers
  • Control Systems
  • Diffraction
  • Engineering
  • Errors
  • Fabrication
  • Gas Bearings
  • Geometry
  • Intensity
  • Interferometers
  • Optics
  • Substrates
  • Wavefronts

Fields of Study

  • Physics

Readers

  • Astronomy/Astrophysics
  • Nanofabrication and Microfabrication.
  • Optical Physics and Photonics.

Technology Areas

  • Directed Energy