Support for the Forty-Second Annual Gaseous Electronics Conference Held in Palo Alto, California on 16-20 October 1989
Abstract
Contents: Diagnostics of Processing Discharges, Hydrocarbon Plasmas, Kinetic Models, Electron Diffusion, Plasma Processing, Heavy Particle and Excited State Collisions, Workshop on the Reference System for RF Plasma Processing Research, Posters, Ionization, Laser Phenomena, Arcs and Glows, Electron and Heavy Particle Collisions, Posters, Ar/Xe Lasers I, Breakdown and Switching, Ar/Xe Lasers II, Cross Section Data I, Fundamental Data from Plasmas, Cross Section II, Posters, Novel Plasmas, Cross Sections I Wish I Knew, Single Wafer Plasma Processing, Collisions Between Atoms, Molecules, and Ions, RF discharges: Models and Experiments, and Optical Diagnostics. (rh)
Document Details
- Document Type
- Technical Report
- Publication Date
- May 07, 1990
- Accession Number
- ADA222881
Entities
People
- D. L. Huestis
Organizations
- SRI International