DoD-URIP Thin Film Deposition Equipment

Abstract

A single source ionized cluster beam deposition system was purchased and installed as part of a thin film research facility. The instrument is for a single source ultrahigh vacuum (UHV) ionized cluster beam (ICB) deposition system which was to be coupled by a UHV transfer system to film diagnostics chambers and other deposition systems.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jun 02, 1986
Accession Number
ADA223421

Entities

People

  • H. R. Shanks

Organizations

  • Iowa State University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Base Pressure
  • Chambers
  • Electron Energy
  • Films
  • Gate Valves
  • Instrumentation
  • Laminar Flow
  • Measurement
  • Power Supplies
  • Pumps
  • Radiation
  • Research Facilities
  • Substrates
  • Thin Films
  • Ultrahigh Vacuum
  • Vacuum
  • Vacuum Chambers

Fields of Study

  • Physics

Readers

  • Research Science/Academic Research
  • Thin Film Deposition Science.