A Cryocooler for High Acceleration Applications

Abstract

Repairs to the sputtering system have been completed and the system is operable. The replaced oscillator tube delivers significantly more power than the previous tube, which is normally advantageous due to higher sputtering rates. However, in our particular application, this increased power is resulting in dissociation of the oxide which are to be sputtered. Optimization of the sputtering conditions to obtain the required oxide film is currently underway.

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Document Details

Document Type
Technical Report
Publication Date
Jun 25, 1990
Accession Number
ADA223618

Entities

People

  • Michael J. Nilles

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Cryocoolers
  • Dissociation
  • Films
  • Heat Exchangers
  • High Acceleration
  • Materials
  • Military Research
  • Optimization
  • Oscillators
  • Oxide Films
  • Oxides
  • Sputtering
  • Strategic Defense Initiative

Fields of Study

  • Physics

Readers

  • Electrical Engineering
  • Electronics Engineering
  • Thin Film Deposition Science.