Mechanical Property Measurement of Polycrystalline Diamond Films
Abstract
The biaxial modulus and residual (post deposition) stress of polycrystalline diamond (PCD) films deposited by microwave plasma CVD is determined using the bulge test technique. This method involves measuring the deflection of a circular membrane under an applied differential pressure. A calibration parameter for the bulge test is determined by evaluating the biaxial modulus of a silicon specimen standard. The film is characterized using X-Ray diffraction. Preliminary results yield a biaxial modulus value of 960 GPa for the PCD film. (jhd)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 08, 1990
- Accession Number
- ADA224037
Entities
People
- G. F. Cardinale
- R. W. Tustison
Organizations
- RTX