Extension of Plasma Source Ion Implantation to Ion Beam Enhanced Deposition
Abstract
The specific plans consist of the following activities: optimize conditions for elevated temperature PSII-IBED of nitride coatings of Ti, Cr, Nb, V, and Zr on test flats to establish the effectiveness of PSII in performing ion beam enhanced deposition; characterize coatings thus developed using test procedures for evaluating the wear, friction, corrosion, and rolling contract fatigue behavior; demonstrate the capability of elevated temperature PSII-IBED on a prototype component, and evaluate its performance; modify and refine our existing Monte Carlo code (TAMIX, developed here) for simulating the elevated- temperature PSII-IBED process and benchmark the code to ensure its predictive capability; and develop a detailed plasma simulation model of PSII to generate realistic ion current and energy distributions of ions to the target (to be used as input to the TAMIX code). (JHD)
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 05, 1989
- Accession Number
- ADA224462
Entities
People
- John R. Conrad
Organizations
- University of Wisconsin–Madison