Growth Studies of CVD-MBE by In-Situ Diagnostics

Abstract

This is a progress report for the first year of the DARPA - URI program 'Growth Studies of CVD-MBE by in-situ Diagnostics.' The goals of the program are to develop non-invasive, real time epitaxial growth monitoring techniques and combine them to gain an understanding of processes that occur during MBE growth from gas sources. We are developing and adapting these techniques on a commercially designed system (Vacuum Generators Inc.) to facilitate technology transfer out of the laboratory into industrial environments. Experimental results, when combined with a Monte Carlo simulation, should give some insight into the growth mechanisms that occur. Progress has been mostly in the construction of the in-situ diagnostic techniques and in modification of the gas source MBE. Several problems have been solved and we are now in a position to acquire data by three techniques; spectroscopic ellipsometry (SE), laser induced fluorescence (LIF) and RHEED.

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Document Details

Document Type
Technical Report
Publication Date
Jun 30, 1990
Accession Number
ADA224661

Entities

People

  • George N. Maracas
  • Krishan K. Bajaj
  • Timothy C Steimle

Organizations

  • Arizona State University

Tags

Communities of Interest

  • Energy and Power Technologies
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Chambers
  • Computers
  • Detection
  • Diffraction
  • Dye Lasers
  • Electron Diffraction
  • Fluorescence
  • Laser Induced Fluorescence
  • Lasers
  • Light Sources
  • Liquid Dye Lasers
  • Mainframe Computers
  • Measurement
  • Optical Properties
  • Refractive Index
  • Spectra
  • Transitions

Readers

  • Optical Physics and Photonics.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Systems Analysis and Design

Technology Areas

  • Directed Energy