Current Density Calculation Using Rectilinear Region Splitting Algorithm for Very Large Scale Integration Metal Migration Analysis

Abstract

In Very Large Scale Integration (VLSI) chips, metal migration(MM) is an important problem from the reliability standpoint. Furthermore, as the feature size is scaled down, MM becomes an even greater problem because of the higher current densities that would exist in the power and ground busses. Because of the complexity of VLSI power busses, there exists a need for a computer-aided design tool to correctly predict the likely failure site(s). This thesis deals with a primitive splitting algorithm that calculates current density waveforms efficiently. These waveforms are used to find the Median Time to Failure (MTF), a major parameter of concern in predicting MM. This algorithm has been motivated by examining the equipotential plots obtained through finite- element method analysis of simple regions. It has been successfully implemented and tested, and some examples are described. Keywords: Metal migration; Electromigration; Current density calculation; Power bus modeling.

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1990
Accession Number
ADA224750

Entities

People

  • Hungse Cha

Organizations

  • University of Illinois Urbana–Champaign

Tags

Communities of Interest

  • Energy and Power Technologies
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Air Force
  • Algorithms
  • Computations
  • Computer-Aided Design
  • Computers
  • Electrical Engineering
  • Engineering
  • Failure Mode And Effect Analysis
  • Geometry
  • Illinois
  • Large Scale Integration
  • Resistance
  • Right Angles
  • Simulations
  • Stochastic Processes
  • United States
  • Very Large Scale Integration

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