Plasma Passivation of Selected MCT Samples. Preliminary Comparison by EER Analysis

Abstract

Plasma Passivation of Selected MCT Samples Preliminary Comparison by EER Analysis. Included are summary reports and data for similar plasma oxides grown on x=.32 LPE p-type, x=.295 bulk n-type, and two x=.2 LPE n-type. Also included is each samples detailed descriptive data. Results are given in the format of X (composition), gamma (related to crystal quality), and theta (related to carrier concentration.

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Document Details

Document Type
Technical Report
Publication Date
Nov 13, 1983
Accession Number
ADA224825

Entities

People

  • Paul M. Raccah

Organizations

  • University of Illinois Urbana–Champaign

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Bulk Materials
  • Electronic Materials
  • High Resolution
  • Materials
  • Mobility
  • Plastic Explosives
  • Radio Frequency Power
  • Standards
  • Substrates
  • Surface Finishing
  • United States
  • United States Government

Readers

  • Semiconductor Device Technology
  • Technical Research and Report Writing.