Plasma Passivation of Selected MCT Samples. Part 1

Abstract

The second quarter has been devoted to the study of the same plasma - deposited oxide layers. This study aimed at determining the presence of mercury in the oxide layer and the alloy compositional changes, if any, at the interface alloy/oxide. It has been determined in a series of SIMS experiments: (1) That mercury is present in all deposited oxides whether plasma deposited or obtained by anodization (TI sample). This was achieved by using plasma duatron oxygen ion source in the Riber SIMS. (b) There is a change in composition of tha alloy at the interface with the oxide and that this change is consistent with the change observed in the earlier electroreflectance experiments. The data are being assembled in to a paper to be published soon.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1983
Accession Number
ADA224826

Entities

People

  • Paul M. Raccah

Organizations

  • University of Illinois Urbana–Champaign

Tags

DTIC Thesaurus Topics

  • Anodizing
  • Contractors
  • Contracts
  • Governments
  • Ion Sources
  • Ions
  • Mobility
  • Plastic Explosives
  • Power
  • Radio Frequency Power

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Thin Film Deposition Science.