Plasma Passivation of Selected MCT Samples. Part 1
Abstract
The second quarter has been devoted to the study of the same plasma - deposited oxide layers. This study aimed at determining the presence of mercury in the oxide layer and the alloy compositional changes, if any, at the interface alloy/oxide. It has been determined in a series of SIMS experiments: (1) That mercury is present in all deposited oxides whether plasma deposited or obtained by anodization (TI sample). This was achieved by using plasma duatron oxygen ion source in the Riber SIMS. (b) There is a change in composition of tha alloy at the interface with the oxide and that this change is consistent with the change observed in the earlier electroreflectance experiments. The data are being assembled in to a paper to be published soon.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1983
- Accession Number
- ADA224826
Entities
People
- Paul M. Raccah
Organizations
- University of Illinois Urbana–Champaign