Installation of Two Predispersing Systems on the Ellipsometer
Abstract
This quarter has been devoted to the installation of two predispersing systems on the ellipsometer as well as to the elimination of systematic and random noise. Results: (a) A grating predisperser has been installed which is also driven by the computer and reduces by 4 orders of magnitude the scattered light in the system thereby permitting greater accuracy in the higher photon energy range. (b) A prism predispersing system has been installed as well which allows us to eliminate higher orders and therefore spares us the need to use automatic filter positioning. (c) A systematic tracking of all random noise sources has allowed us to improve the signal to noise ratio by a factor of two thereby making it easier to carry out first, second and third numerical derivations of the experimental signal.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1983
- Accession Number
- ADA224829
Entities
People
- Paul M. Raccah
Organizations
- University of Illinois Urbana–Champaign