The Heat Cell
Abstract
A cell was needed to modify the ellipsometer such that one can change the temperature of the sample in a well controlled atmosphere. A description of the design follows.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1983
- Accession Number
- ADA224834
Entities
People
- Paul M. Raccah
Organizations
- University of Illinois Urbana–Champaign