Status of the Hot Cell
Abstract
The Hot Cell was needed to study semiconductor surfaces at elevated temperatures in an atmosphere of a mixture of argon and hydrogen gases. The temperatures of interest were believed to range from 20 C to a maximum of 150 C. To meet this need a brass cell was assembled using soft solder. Four windows were mounted on the cell. Two reflection configurations from the sample were then possible by utilizing three of the windows in different pairs. One configuration allows for use at an angle of incidence of 67.5 deg and the other permits use at an angle of incidence of 45 deg. The 67.5 deg arrangement which is most frequently used can be very difficult to align. The fourth window mounted opposite the sample mount greatly facilitates this alignment by allowing the direct observation of the beam spot position on the sample. The windows are mounted on flanges that are attached to the body of the cell through formed steel bellows.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1983
- Accession Number
- ADA224835
Entities
People
- Paul M. Raccah
Organizations
- University of Illinois Urbana–Champaign