Solid-State Sensor and Actuator Workshop Held in Hilton Head Island, South Carolina on 4-7 June 1990
Abstract
Partial contents: Quartz microbalance studies of solvent and ion transport in thin polymer films in sensor applications of the QCM; Multiple- Frequency Surface Acoustic Wave Devices as Sensors; Performance Characteristics of Second Generation Polysilicon Resonating Beam Force Transducers; Friction and Wear in Microfabricated Harmonic Side-Drive Motors; Electrostatically Balanced Comb Drive for Controlled Levitation; A Micromachined Silicon Scan Tip for an Atomic Force Microscope; Pressure Sensor Design and Simulation using the CAEMEMS-D Module; Automatic Generation of a 3-D Solid Model of a Microfabricated Structure; The Mechanism of Anisotropic Electrochemical Silicon Etching in Alkaline Solutions; An Implantable CMOS Analog Signal Processor for Multiplexed Microelectrode Recording Arrays; 2-D Magnetic Field Sensor Based on Vertical Hall Device; Deep X-Ray Lithography for Micromechanics; RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators; Wide Dynamic Range Direct Digital Output Accelerometer; A Multi-Element Monolithic Mass Flowmeter with On-Chip CMOS Readout Electronics; Silicon Micromachining in the Fabrication of Biosensors Using Living Cells; and Secondary Sensitivities and Stability of Ultrasensitive Silicon Pressure Sensors. Symposia.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1990
- Accession Number
- ADA224850
Entities
People
- Richard S. Muller
Organizations
- University of California, Berkeley