DoD-URIP Thin Film Deposition Equipment. Phase 2

Abstract

A triple source ionized cluster beam deposition system was purchased and installed as part of a thin film research facility. A scanning auger system was added with university matching funds. Keywords: Thin film storage devices, Ion beams.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1984
Accession Number
ADA224905

Entities

People

  • H. S. Shanks
  • K. M. Lakin

Organizations

  • Iowa State University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Barometric Pressure
  • Base Pressure
  • Chambers
  • Electron Energy
  • Films
  • Ion Beams
  • Ions
  • Measurement
  • Power Supplies
  • Research Facilities
  • Scanning
  • Single Crystals
  • Thin Film Storage Devices
  • Thin Films
  • Ultrahigh Vacuum
  • Vacuum Chambers

Readers

  • Research Science/Academic Research
  • Thin Film Deposition Science.