Dissociative Adsorption of Ph3 on Si(111)-(7x7). A High Resolution Electron Energy Loss Spectroscopy Study

Abstract

Dissociative adsorption of PH3 on Si(111)-(7x7) has been observed at 80 K. The Si-H species is observed to be produced upon PH3 adsorption. Depending upon the PH3 surface coverage, PH3(a) (minority species) and PH2(a) species are found on the surface. The thermal dissociation of the surface PH2 species occurs between 450 and 500 K, resulting in the capture of hydrogen and phosphorus on the surface. Keywords: Phosphine, Silicon, Doping, Phosphorus, Dissociative.

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Document Details

Document Type
Technical Report
Publication Date
Aug 07, 1990
Accession Number
ADA225313

Entities

People

  • J. T. Yates Jr.
  • M. L. Colaianni
  • P. J. Chen
  • R. M. Wallace

Organizations

  • University of Pittsburgh

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Chemistry
  • Data Acquisition
  • Desorption
  • Dissociation
  • Electron Energy
  • Electron Spectroscopy
  • Electrons
  • Frequency
  • High Resolution
  • Hydrogen
  • Low Temperature
  • Measurement
  • Military Research
  • Spectra
  • Spectroscopy

Readers

  • Analytical Chemistry
  • Organic Chemistry
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene