Viscoelasticity and Creep Recovery of Polyimide Thin Films

Abstract

Creep and recovery of a polyimide thin film well below its glass transition temperature is demonstrated through use of circular membrane bulge test. Extensive use is made of a recently developed mechanical CAD system linked to the fabrication process to model the structure. A creep power law is used in a nonlinear finite element (FEM) analysis to fit the experimental results, thereby measuring the viscoelastic properties.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1990
Accession Number
ADA225475

Entities

People

  • Fariborz Maseeh
  • Stephen D. Senturia

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Biaxial Stresses
  • Computer Science
  • Creep
  • Elastic Properties
  • Engineering
  • Fabrication
  • Films
  • Glass Transition Temperature
  • Materials
  • Materials Science
  • Measurement
  • Mechanical Working
  • Micro-Machines
  • Simulators
  • Thin Films
  • Transition Temperature
  • Viscoelasticity

Fields of Study

  • Engineering
  • Physics

Readers

  • Computational Fluid Dynamics (CFD)
  • Mechanical Engineering/Mechanics of Materials.
  • Thin Film Deposition Science.