Interaction of Copper with a Vapor Deposited Polyimide Film

Abstract

The interaction of copper with a vapor deposited film of PMDA-ODA polyimide was studied using x-ray photoelectron spectroscopy (XPS) and scanning tunnelling microscopy (STM). Copper was evaporated onto the polyimide surface to total thickness estimated to be about five atomic layers. The copper initially interacts with the planar imide ring - the nitrogen XPS signal is preferentially attenuated, some copper is oxidized, and the carbonyl XPS intensities are altered. We find no evidence for chemical interaction with the ODA part of the polyimide. Heating the copper covered surface leads to redistribution of copper, probably below the surface as reported in earlier studies. STM images of the heated surfaces show that substantial surface roughening has occurred.

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Document Details

Document Type
Technical Report
Publication Date
Aug 15, 1990
Accession Number
ADA225819

Entities

People

  • Erich N. Grossman
  • R. G. Mack
  • W. N. Unertl

Organizations

  • University of Maine

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Annealing
  • Attenuation
  • Carbonyl Complexes
  • Chemistry
  • Civil Engineering
  • Coatings
  • Crystal Structure
  • Emission
  • Energy
  • Films
  • Heat Treatment
  • Military Research
  • Spectroscopy
  • Tunneling
  • Vacuum Chambers
  • X Ray Photoelectron Spectroscopy
  • X Rays

Fields of Study

  • Materials science

Readers

  • Polymer Science and Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene