Submicron Structures and Various Technology
Abstract
Work by Prof. J. Allen and his collaborators is summarized here. Document complete per ARO. Submicron Structures Technology and Research. Microstructural Evolution in Thin Films of Electronic Materials. Chemical Reaction Dynamics at Surfaces. Measurement of Electron-phonon interactions through large-amplitude phonon excitation. Chemical beam epitaxy of compound semiconductors.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1990
- Accession Number
- ADA226438
Entities
People
- Carl V. Thompson
- Daniel Kleppner
- Henry I. Smith
- Jonathan Allen
- Keith A. Nelson
- Leslie A. Kolodziejski
- Sylvia T. Ceyer
Organizations
- Massachusetts Institute of Technology