The Fabrication and Characteristics of Ta sub 2 N Field Emitters
Abstract
The electron beam emission elements used in micro-manufacturing are made more and more important with the rapid advancement of electronic components and devices. Furthermore, the development of scanning electron microscopes with high resolution also promote the study of high intensity electron beam sources. At present, the mechanism of field emission of tungsten has been studied extensively and the results have been applied to many practical situations. However, the work function of tungsten is relatively high and due to the adsorption and decomposition of residual gas atoms and molecules on the surface, the diffusion of these adsorbed atoms and molecules, and the impact on the surface of the cathode from the positive ions produced by the ionization of the gas molecules, the emission current was in general very unstable. In order to keep the current stable, it is necessary to operate the emitter under a vacuum of ten to the minus 9th power torr or better. This is the reason why the tungsten field emitter cathode has not been used extensively. Therefore, the investigation of a new electron beam source with properties better than tungsten is important. Keywords: Chinese translations.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 20, 1990
- Accession Number
- ADA227556
Entities
People
- Takeo Kato
- Xiang-qi Jiang
Organizations
- National Air and Space Intelligence Center