X-Ray Optics Research
Abstract
This report describes the production of x-ray optical elements for several wavelengths by sputtering. It describes the installation of a 'silicon/ metals' molecular beam epitaxy (MBE) apparatus and its use in an extensive study of multilayer mirrors based on molybdenum and silicon. Continuing work on several additional materials is described. Finally, studies of substrate and interfacial roughness, using a scanning tunneling microscope (STM) and a WYKO phase-shifting interferometer, are presented.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 20, 1990
- Accession Number
- ADA228940
Entities
People
- Charles M. Falco
Organizations
- University of Arizona