(DRUIP) Nozzle Beam Deposited Diamondlike Carbon Films
Abstract
It was attempted to deposit hard carbon films using the ionized cluster beam deposition method with organic materials. The principle idea was to have the organic molecules to decompose on impact with the substrate. A major problem involved the decomposition of organic starting material in the crucible. It was hoped to use lower crucible temperatures to reduce decomposition. Increased crucible temperatures were eventually used to increase the deposition rate. This resulted in more hydrogen in the chamber and the 50 I/s turbomolecular pump was unable to maintain a pressure below about 8 x 10-4 torr. Changes and experiments are being made, but to date the endeavor has been unsuccessful. (JS)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 30, 1989
- Accession Number
- ADA229196
Entities
People
- Calvin W. Lowe
Organizations
- Hampton University