(DRUIP) Nozzle Beam Deposited Diamondlike Carbon Films

Abstract

It was attempted to deposit hard carbon films using the ionized cluster beam deposition method with organic materials. The principle idea was to have the organic molecules to decompose on impact with the substrate. A major problem involved the decomposition of organic starting material in the crucible. It was hoped to use lower crucible temperatures to reduce decomposition. Increased crucible temperatures were eventually used to increase the deposition rate. This resulted in more hydrogen in the chamber and the 50 I/s turbomolecular pump was unable to maintain a pressure below about 8 x 10-4 torr. Changes and experiments are being made, but to date the endeavor has been unsuccessful. (JS)

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Nov 30, 1989
Accession Number
ADA229196

Entities

People

  • Calvin W. Lowe

Organizations

  • Hampton University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Abstracts
  • Classification
  • Commerce
  • Crimping Tools
  • Crucibles
  • Decomposition
  • Hydrogen
  • Instructions
  • Mass Spectrometers
  • Materials
  • Optical Scanning
  • Organic Materials
  • Physics
  • Power Supplies
  • Production
  • Security
  • Standards

Readers

  • Surface Engineering/Surface Coating Technology.
  • Systems Analysis and Design
  • Thin Film Deposition Science.