Physics and Technology of III-V Pseudomorphic Structures
Abstract
AlGaAs/InGaAs modulation-doped field-effect transistors with a nominally (InAs)2(GaAs)2 channel grown by migration-enhanced epitaxy exhibit better luminescent and device properties than those with a random alloy In(0.4) Ga(0.6)As channel grown by molecular-beam epitaxy (MBE). We have proposed and applied a new kinetic model, which includes both group-III alkyl and group-V species in the surface chemical reactions, to the growth of GaAs, GaSb, and InAs by metalorganic MBE or chemical-beam epitaxy (CBE). We have also set up a gas- source MBE system with elemental group-III and doping sources as well as arsine and phosphine. We used the group-V-limited growth mode to determine in situ the exact values of V/III atomic ratios during growth of GaP, InP, AlP, and GaAs. X- ray studies of an InAlAs/InP superlattice indicates the existence of a P/As- intermixed, strained interface.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 15, 1990
- Accession Number
- ADA229275
Entities
People
- B. W. Liang
- C. W. Tu
- Jinlun Zhang
Organizations
- University of California, San Diego