Integrated Synthesis and Post Processing of Silicon Carbide and Aluminum Nitride
Abstract
Synthesis of nonoxide powders in a nonthermal (microwave) plasma was demonstrated, using SiC, Si3N4 and Si as model materials. Particle sizes are ultrafine, 2-5nm. Compositions and structures have been characterized. Equipment has been developed and characterized. Creep of polycrystalline AlN has been investigated for the first time. Mechanisms are identified.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 13, 1990
- Accession Number
- ADA230810
Entities
People
- A. I . Kingon
- Aastha Singh
- Robert F Davis
Organizations
- North Carolina State University