Integrated Synthesis and Post Processing of Silicon Carbide and Aluminum Nitride

Abstract

Synthesis of nonoxide powders in a nonthermal (microwave) plasma was demonstrated, using SiC, Si3N4 and Si as model materials. Particle sizes are ultrafine, 2-5nm. Compositions and structures have been characterized. Equipment has been developed and characterized. Creep of polycrystalline AlN has been investigated for the first time. Mechanisms are identified.

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Document Details

Document Type
Technical Report
Publication Date
Dec 13, 1990
Accession Number
ADA230810

Entities

People

  • A. I . Kingon
  • Aastha Singh
  • Robert F Davis

Organizations

  • North Carolina State University

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Aluminum Nitrides
  • Ceramic Materials
  • Heat Of Activation
  • High Temperature
  • Materials
  • Materials Science
  • Microwaves
  • Military Research
  • Nanoparticles
  • North Carolina
  • Particle Size
  • Particles
  • Powders
  • Scientists
  • Silicon
  • Silicon Carbide

Readers

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