Optoelectronic III-V Heterostructures on SI Substrates
Abstract
The objectives of this research program is to investigate the epitaxial growth and properties of heterostructures of the III-V semiconductors, particularly the InGaAsP/InP system, on Si substrates. The heterostructures are being grown by gas-source molecular beam epitaxy (GSMBE), a technique which have previously used to produce high performance optoelectronic devices using lattice-matched InGaAs/InP and LnGaAsP/InP heterostructures and to grow high quality InP layers on Si wafers. The research is focused on exploring methods to reduce misfit dislocations and thus achieve InGaAsP/InP heteroepitaxial materials suitable for high quality optoelectronic devices on Si substrates. InP and lattice-matched InGaAsP alloys are the primary material for high speed optoelectronic telecommunication systems, and an InP-on-Si materials technology would enable VLSI photonics to become a reality.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 14, 1990
- Accession Number
- ADA232035
Entities
People
- Gary Y. Robinson
Organizations
- Colorado State University