Laser Assisted CVD Growth of A1N and GaN
Abstract
This is the first annual report of a project for investigating laser assisted CVD growth of A1N and GaN. In the first year three experimental systems have been built. The first is a small, mobile CVD test system for evaluating growth schemes and detection methods for gas and heterogeneous phases. The second is a tunable diode laser spectrometer for monitoring gas phase components in a CVD reactor. The third is a dye laser system for monitoring atoms and small free radicals in the CVD system. First experiments have been done with all three systems. In particular we are investigating the use of 248 nm photolysis of trimethylalluminum near a slightly heated substrates in a mixture of TMA1 and hydrazine for growth of A1N.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 31, 1990
- Accession Number
- ADA232379
Entities
People
- Gary Harris
- Joan M. Frye
- Joshua B. Halpern
- M. Aluko
Organizations
- Howard University